Coherence Improvement of Dual-Lens Electron Holography

نویسندگان

چکیده

Abstract Coherence is one of the limiting factors in off-axis electron holography applications. This paper reports methods to improve coherence ∼18-fold by using a smaller biprism and implementing direct counting camera (K-camera) combination with an imaging filter system. We achieved 0.4 nm fringe spacing 1.5 μm field-of-view ∼33% contrast. The maximum number, N′, ∼1.8 × 103 was achieved, where N′ defined as number fringes times High spatial resolution junction profile images (nm scale) n-channel p-channel field-effect transistors (nFET pFET) are demonstrated large (μm scale).

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ژورنال

عنوان ژورنال: Microscopy Today

سال: 2023

ISSN: ['2150-3583', '1551-9295']

DOI: https://doi.org/10.1093/mictod/qaad027